3/5/2012	8:50:02 AM	Tube furnace set to 50
3/5/2012	8:50:32 AM	Main Vac valve closed
3/5/2012	8:51:06 AM	Main Vac valve opened
3/5/2012	8:51:54 AM	Recipe started at 8:51 AM
3/5/2012	8:51:54 AM	Helium valve closed
3/5/2012	8:51:54 AM	H2 valve closed
3/5/2012	8:51:54 AM	BCl3 valve closed
3/5/2012	8:51:54 AM	PH3 valve closed
3/5/2012	8:51:54 AM	SiCl4 pre valve closed
3/5/2012	8:51:54 AM	SiCl4 post valve closed
3/5/2012	8:51:54 AM	Main Vac valve closed
3/5/2012	8:51:54 AM	Bypass valve closed
3/5/2012	8:51:54 AM	Bubbler valve closed
3/5/2012	8:51:54 AM	Helium MFC set to  0.000000
3/5/2012	8:51:54 AM	H2 MFC set to  0.000000
3/5/2012	8:51:54 AM	BCl3 MFC set to  0.000000
3/5/2012	8:51:54 AM	PH3 MFC set to  0.000000
3/5/2012	8:51:54 AM	SiCl4 MFC set to  0.000000
3/5/2012	8:51:54 AM	Bypass solenoid MFC set to  0.000000
3/5/2012	8:51:54 AM	Tube furnace set to 0
3/5/2012	8:51:57 AM	Helium valve closed
3/5/2012	8:51:57 AM	BCl3 valve closed
3/5/2012	8:51:57 AM	PH3 valve closed
3/5/2012	8:51:57 AM	SiCl4 pre valve closed
3/5/2012	8:51:57 AM	SiCl4 post valve closed
3/5/2012	8:51:57 AM	Main Vac valve closed
3/5/2012	8:51:57 AM	Bypass valve closed
3/5/2012	8:51:57 AM	Bubbler valve closed
3/5/2012	8:51:57 AM	H2 valve opened
3/5/2012	8:51:57 AM	Helium MFC set to  0.000000
3/5/2012	8:51:57 AM	H2 MFC set to  500.000000
3/5/2012	8:51:57 AM	BCl3 MFC set to  0.000000
3/5/2012	8:51:57 AM	PH3 MFC set to  0.000000
3/5/2012	8:51:57 AM	SiCl4 MFC set to  0.000000
3/5/2012	8:51:57 AM	Bypass solenoid MFC set to  0.000000
3/5/2012	8:51:57 AM	Tube furnace set to 50
3/5/2012	8:53:04 AM	Helium valve closed
3/5/2012	8:53:04 AM	BCl3 valve closed
3/5/2012	8:53:04 AM	PH3 valve closed
3/5/2012	8:53:04 AM	SiCl4 pre valve closed
3/5/2012	8:53:04 AM	SiCl4 post valve closed
3/5/2012	8:53:04 AM	Main Vac valve closed
3/5/2012	8:53:04 AM	Bypass valve closed
3/5/2012	8:53:04 AM	H2 valve opened
3/5/2012	8:53:04 AM	Bubbler valve opened
3/5/2012	8:53:04 AM	Helium MFC set to  0.000000
3/5/2012	8:53:04 AM	H2 MFC set to  500.000000
3/5/2012	8:53:04 AM	BCl3 MFC set to  0.000000
3/5/2012	8:53:04 AM	PH3 MFC set to  0.000000
3/5/2012	8:53:04 AM	SiCl4 MFC set to  0.000000
3/5/2012	8:53:04 AM	Bypass solenoid MFC set to  0.000000
3/5/2012	8:53:04 AM	Tube furnace set to 50
3/5/2012	8:53:05 AM	Helium valve closed
3/5/2012	8:53:05 AM	BCl3 valve closed
3/5/2012	8:53:05 AM	PH3 valve closed
3/5/2012	8:53:05 AM	SiCl4 pre valve closed
3/5/2012	8:53:05 AM	SiCl4 post valve closed
3/5/2012	8:53:05 AM	Main Vac valve closed
3/5/2012	8:53:05 AM	Bypass valve closed
3/5/2012	8:53:05 AM	H2 valve opened
3/5/2012	8:53:05 AM	Bubbler valve opened
3/5/2012	8:53:05 AM	Helium MFC set to  0.000000
3/5/2012	8:53:05 AM	H2 MFC set to  450.000000
3/5/2012	8:53:05 AM	BCl3 MFC set to  0.000000
3/5/2012	8:53:05 AM	PH3 MFC set to  0.000000
3/5/2012	8:53:05 AM	SiCl4 MFC set to  0.000000
3/5/2012	8:53:05 AM	Bypass solenoid MFC set to  0.000000
3/5/2012	8:53:05 AM	Tube furnace set to 1000
3/5/2012	9:13:05 AM	Helium valve closed
3/5/2012	9:13:05 AM	PH3 valve closed
3/5/2012	9:13:05 AM	Main Vac valve closed
3/5/2012	9:13:05 AM	Bypass valve closed
3/5/2012	9:13:05 AM	H2 valve opened
3/5/2012	9:13:05 AM	BCl3 valve opened
3/5/2012	9:13:05 AM	SiCl4 pre valve opened
3/5/2012	9:13:05 AM	SiCl4 post valve opened
3/5/2012	9:13:05 AM	Bubbler valve opened
3/5/2012	9:13:05 AM	Helium MFC set to  0.000000
3/5/2012	9:13:05 AM	H2 MFC set to  450.000000
3/5/2012	9:13:05 AM	BCl3 MFC set to  1.300000
3/5/2012	9:13:05 AM	PH3 MFC set to  0.000000
3/5/2012	9:13:05 AM	SiCl4 MFC set to  50.000000
3/5/2012	9:13:05 AM	Bypass solenoid MFC set to  0.000000
3/5/2012	9:13:05 AM	Tube furnace set to 1000
3/5/2012	9:28:05 AM	Helium valve closed
3/5/2012	9:28:05 AM	BCl3 valve closed
3/5/2012	9:28:05 AM	PH3 valve closed
3/5/2012	9:28:05 AM	SiCl4 pre valve closed
3/5/2012	9:28:05 AM	SiCl4 post valve closed
3/5/2012	9:28:05 AM	Main Vac valve closed
3/5/2012	9:28:05 AM	Bypass valve closed
3/5/2012	9:28:05 AM	H2 valve opened
3/5/2012	9:28:05 AM	Bubbler valve opened
3/5/2012	9:28:05 AM	Helium MFC set to  0.000000
3/5/2012	9:28:05 AM	H2 MFC set to  500.000000
3/5/2012	9:28:05 AM	BCl3 MFC set to  0.000000
3/5/2012	9:28:05 AM	PH3 MFC set to  0.000000
3/5/2012	9:28:05 AM	SiCl4 MFC set to  0.000000
3/5/2012	9:28:05 AM	Bypass solenoid MFC set to  0.000000
3/5/2012	9:28:05 AM	Tube furnace set to 750
3/5/2012	9:30:05 AM	H2 valve closed
3/5/2012	9:30:05 AM	BCl3 valve closed
3/5/2012	9:30:05 AM	PH3 valve closed
3/5/2012	9:30:05 AM	SiCl4 pre valve closed
3/5/2012	9:30:05 AM	SiCl4 post valve closed
3/5/2012	9:30:05 AM	Main Vac valve closed
3/5/2012	9:30:05 AM	Bypass valve closed
3/5/2012	9:30:05 AM	Helium valve opened
3/5/2012	9:30:05 AM	Bubbler valve opened
3/5/2012	9:30:05 AM	Helium MFC set to  400.000000
3/5/2012	9:30:05 AM	H2 MFC set to  0.000000
3/5/2012	9:30:05 AM	BCl3 MFC set to  0.000000
3/5/2012	9:30:05 AM	PH3 MFC set to  0.000000
3/5/2012	9:30:05 AM	SiCl4 MFC set to  0.000000
3/5/2012	9:30:05 AM	Bypass solenoid MFC set to  0.000000
3/5/2012	9:30:06 AM	Tube furnace set to 0
3/5/2012	9:50:22 AM	Helium valve closed
3/5/2012	9:50:22 AM	H2 valve closed
3/5/2012	9:50:22 AM	BCl3 valve closed
3/5/2012	9:50:22 AM	PH3 valve closed
3/5/2012	9:50:22 AM	SiCl4 pre valve closed
3/5/2012	9:50:22 AM	SiCl4 post valve closed
3/5/2012	9:50:22 AM	Main Vac valve closed
3/5/2012	9:50:22 AM	Bypass valve closed
3/5/2012	9:50:22 AM	Bubbler valve closed
3/5/2012	9:50:22 AM	Helium MFC set to  0.000000
3/5/2012	9:50:22 AM	H2 MFC set to  0.000000
3/5/2012	9:50:22 AM	BCl3 MFC set to  0.000000
3/5/2012	9:50:22 AM	PH3 MFC set to  0.000000
3/5/2012	9:50:22 AM	SiCl4 MFC set to  0.000000
3/5/2012	9:50:22 AM	Bypass solenoid MFC set to  0.000000
3/5/2012	9:50:22 AM	Tube furnace set to 50
3/5/2012	9:51:26 AM	Run aborted at 9:51 AM
3/5/2012	9:51:26 AM	Helium valve closed
3/5/2012	9:51:26 AM	H2 valve closed
3/5/2012	9:51:26 AM	BCl3 valve closed
3/5/2012	9:51:26 AM	PH3 valve closed
3/5/2012	9:51:26 AM	SiCl4 pre valve closed
3/5/2012	9:51:26 AM	SiCl4 post valve closed
3/5/2012	9:51:26 AM	Bypass valve closed
3/5/2012	9:51:26 AM	Main Vac valve closed
3/5/2012	9:51:26 AM	Bubbler valve closed
3/5/2012	9:51:26 AM	Helium MFC set to  0.000000
3/5/2012	9:51:26 AM	H2 MFC set to  0.000000
3/5/2012	9:51:26 AM	BCl3 MFC set to  0.000000
3/5/2012	9:51:26 AM	PH3 MFC set to  0.000000
3/5/2012	9:51:26 AM	SiCl4 MFC set to  0.000000
3/5/2012	9:51:26 AM	Tube furnace set to 0
3/5/2012	9:53:55 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/5/2012	9:53:56 AM	Recipe started at 9:53 AM
3/5/2012	9:53:56 AM	Helium valve closed
3/5/2012	9:53:56 AM	H2 valve closed
3/5/2012	9:53:56 AM	BCl3 valve closed
3/5/2012	9:53:56 AM	PH3 valve closed
3/5/2012	9:53:56 AM	SiCl4 pre valve closed
3/5/2012	9:53:56 AM	SiCl4 post valve closed
3/5/2012	9:53:56 AM	Main Vac valve closed
3/5/2012	9:53:56 AM	Bubbler valve closed
3/5/2012	9:53:56 AM	Bypass valve opened
3/5/2012	9:53:56 AM	Helium MFC set to  0.000000
3/5/2012	9:53:56 AM	H2 MFC set to  0.000000
3/5/2012	9:53:56 AM	BCl3 MFC set to  0.000000
3/5/2012	9:53:56 AM	PH3 MFC set to  0.000000
3/5/2012	9:53:56 AM	SiCl4 MFC set to  0.000000
3/5/2012	9:53:56 AM	Bypass solenoid MFC set to  0.000000
3/5/2012	9:53:56 AM	Tube furnace set to 0
3/5/2012	9:54:54 AM	Helium valve closed
3/5/2012	9:54:54 AM	H2 valve closed
3/5/2012	9:54:54 AM	BCl3 valve closed
3/5/2012	9:54:54 AM	PH3 valve closed
3/5/2012	9:54:54 AM	SiCl4 pre valve closed
3/5/2012	9:54:54 AM	SiCl4 post valve closed
3/5/2012	9:54:54 AM	Main Vac valve closed
3/5/2012	9:54:54 AM	Bubbler valve closed
3/5/2012	9:54:54 AM	Bypass valve opened
3/5/2012	9:54:54 AM	Helium MFC set to  0.000000
3/5/2012	9:54:54 AM	H2 MFC set to  0.000000
3/5/2012	9:54:54 AM	BCl3 MFC set to  0.000000
3/5/2012	9:54:54 AM	PH3 MFC set to  0.000000
3/5/2012	9:54:54 AM	SiCl4 MFC set to  0.000000
3/5/2012	9:54:54 AM	Bypass solenoid MFC set to  0.000000
3/5/2012	9:54:55 AM	Tube furnace set to 0
3/5/2012	9:55:55 AM	Helium valve closed
3/5/2012	9:55:55 AM	H2 valve closed
3/5/2012	9:55:55 AM	BCl3 valve closed
3/5/2012	9:55:55 AM	PH3 valve closed
3/5/2012	9:55:55 AM	SiCl4 pre valve closed
3/5/2012	9:55:55 AM	SiCl4 post valve closed
3/5/2012	9:55:55 AM	Bypass valve closed
3/5/2012	9:55:55 AM	Bubbler valve closed
3/5/2012	9:55:55 AM	Main Vac valve opened
3/5/2012	9:55:55 AM	Helium MFC set to  0.000000
3/5/2012	9:55:55 AM	H2 MFC set to  0.000000
3/5/2012	9:55:55 AM	BCl3 MFC set to  0.000000
3/5/2012	9:55:55 AM	PH3 MFC set to  0.000000
3/5/2012	9:55:55 AM	SiCl4 MFC set to  0.000000
3/5/2012	9:55:55 AM	Bypass solenoid MFC set to  0.000000
3/5/2012	9:55:55 AM	Tube furnace set to 0
3/5/2012	9:55:56 AM	Run finished at 9:55 AM
3/5/2012	9:55:56 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/5/2012	10:36:25 AM	Main Vac valve closed
3/5/2012	10:36:47 AM	Main Vac valve opened
3/5/2012	10:36:53 AM	Helium MFC set to  20.000000
3/5/2012	10:36:54 AM	Helium valve opened
3/5/2012	10:37:43 AM	Helium valve closed
3/5/2012	10:38:00 AM	Tube furnace set to 70
3/5/2012	10:38:06 AM	Helium MFC set to  20.000000
3/5/2012	10:38:07 AM	Helium valve opened
3/5/2012	10:38:31 AM	Helium valve closed
3/5/2012	10:38:35 AM	Helium MFC set to  0.000000
3/5/2012	10:38:59 AM	Main Vac valve closed
3/5/2012	10:39:29 AM	Main Vac valve opened
3/5/2012	10:41:22 AM	Recipe started at 10:41 AM
3/5/2012	10:41:22 AM	Helium valve closed
3/5/2012	10:41:22 AM	H2 valve closed
3/5/2012	10:41:22 AM	BCl3 valve closed
3/5/2012	10:41:22 AM	PH3 valve closed
3/5/2012	10:41:22 AM	SiCl4 pre valve closed
3/5/2012	10:41:22 AM	SiCl4 post valve closed
3/5/2012	10:41:22 AM	Main Vac valve closed
3/5/2012	10:41:22 AM	Bypass valve closed
3/5/2012	10:41:22 AM	Bubbler valve closed
3/5/2012	10:41:22 AM	Helium MFC set to  0.000000
3/5/2012	10:41:22 AM	H2 MFC set to  0.000000
3/5/2012	10:41:22 AM	BCl3 MFC set to  0.000000
3/5/2012	10:41:22 AM	PH3 MFC set to  0.000000
3/5/2012	10:41:22 AM	SiCl4 MFC set to  0.000000
3/5/2012	10:41:22 AM	Bypass solenoid MFC set to  0.000000
3/5/2012	10:41:22 AM	Tube furnace set to 0
3/5/2012	10:41:25 AM	Helium valve closed
3/5/2012	10:41:25 AM	BCl3 valve closed
3/5/2012	10:41:25 AM	PH3 valve closed
3/5/2012	10:41:25 AM	SiCl4 pre valve closed
3/5/2012	10:41:25 AM	SiCl4 post valve closed
3/5/2012	10:41:25 AM	Main Vac valve closed
3/5/2012	10:41:25 AM	Bypass valve closed
3/5/2012	10:41:25 AM	Bubbler valve closed
3/5/2012	10:41:25 AM	H2 valve opened
3/5/2012	10:41:25 AM	Helium MFC set to  0.000000
3/5/2012	10:41:25 AM	H2 MFC set to  500.000000
3/5/2012	10:41:25 AM	BCl3 MFC set to  0.000000
3/5/2012	10:41:25 AM	PH3 MFC set to  0.000000
3/5/2012	10:41:25 AM	SiCl4 MFC set to  0.000000
3/5/2012	10:41:25 AM	Bypass solenoid MFC set to  0.000000
3/5/2012	10:41:25 AM	Tube furnace set to 50
3/5/2012	10:42:32 AM	Helium valve closed
3/5/2012	10:42:32 AM	BCl3 valve closed
3/5/2012	10:42:32 AM	PH3 valve closed
3/5/2012	10:42:32 AM	SiCl4 pre valve closed
3/5/2012	10:42:32 AM	SiCl4 post valve closed
3/5/2012	10:42:32 AM	Main Vac valve closed
3/5/2012	10:42:32 AM	Bypass valve closed
3/5/2012	10:42:32 AM	H2 valve opened
3/5/2012	10:42:32 AM	Bubbler valve opened
3/5/2012	10:42:32 AM	Helium MFC set to  0.000000
3/5/2012	10:42:32 AM	H2 MFC set to  500.000000
3/5/2012	10:42:32 AM	BCl3 MFC set to  0.000000
3/5/2012	10:42:32 AM	PH3 MFC set to  0.000000
3/5/2012	10:42:32 AM	SiCl4 MFC set to  0.000000
3/5/2012	10:42:32 AM	Bypass solenoid MFC set to  0.000000
3/5/2012	10:42:32 AM	Tube furnace set to 50
3/5/2012	10:42:33 AM	Helium valve closed
3/5/2012	10:42:33 AM	BCl3 valve closed
3/5/2012	10:42:33 AM	PH3 valve closed
3/5/2012	10:42:33 AM	SiCl4 pre valve closed
3/5/2012	10:42:33 AM	SiCl4 post valve closed
3/5/2012	10:42:33 AM	Main Vac valve closed
3/5/2012	10:42:33 AM	Bypass valve closed
3/5/2012	10:42:33 AM	H2 valve opened
3/5/2012	10:42:33 AM	Bubbler valve opened
3/5/2012	10:42:33 AM	Helium MFC set to  0.000000
3/5/2012	10:42:33 AM	H2 MFC set to  450.000000
3/5/2012	10:42:33 AM	BCl3 MFC set to  0.000000
3/5/2012	10:42:33 AM	PH3 MFC set to  0.000000
3/5/2012	10:42:33 AM	SiCl4 MFC set to  0.000000
3/5/2012	10:42:33 AM	Bypass solenoid MFC set to  0.000000
3/5/2012	10:42:34 AM	Tube furnace set to 1000
3/5/2012	11:02:34 AM	Helium valve closed
3/5/2012	11:02:34 AM	PH3 valve closed
3/5/2012	11:02:34 AM	Main Vac valve closed
3/5/2012	11:02:34 AM	Bypass valve closed
3/5/2012	11:02:34 AM	H2 valve opened
3/5/2012	11:02:34 AM	BCl3 valve opened
3/5/2012	11:02:34 AM	SiCl4 pre valve opened
3/5/2012	11:02:34 AM	SiCl4 post valve opened
3/5/2012	11:02:34 AM	Bubbler valve opened
3/5/2012	11:02:34 AM	Helium MFC set to  0.000000
3/5/2012	11:02:34 AM	H2 MFC set to  450.000000
3/5/2012	11:02:34 AM	BCl3 MFC set to  1.300000
3/5/2012	11:02:34 AM	PH3 MFC set to  0.000000
3/5/2012	11:02:34 AM	SiCl4 MFC set to  50.000000
3/5/2012	11:02:34 AM	Bypass solenoid MFC set to  0.000000
3/5/2012	11:02:34 AM	Tube furnace set to 1000
3/5/2012	11:19:34 AM	Helium valve closed
3/5/2012	11:19:34 AM	BCl3 valve closed
3/5/2012	11:19:34 AM	PH3 valve closed
3/5/2012	11:19:34 AM	SiCl4 pre valve closed
3/5/2012	11:19:34 AM	SiCl4 post valve closed
3/5/2012	11:19:34 AM	Main Vac valve closed
3/5/2012	11:19:34 AM	Bypass valve closed
3/5/2012	11:19:34 AM	H2 valve opened
3/5/2012	11:19:34 AM	Bubbler valve opened
3/5/2012	11:19:34 AM	Helium MFC set to  0.000000
3/5/2012	11:19:34 AM	H2 MFC set to  500.000000
3/5/2012	11:19:34 AM	BCl3 MFC set to  0.000000
3/5/2012	11:19:34 AM	PH3 MFC set to  0.000000
3/5/2012	11:19:34 AM	SiCl4 MFC set to  0.000000
3/5/2012	11:19:34 AM	Bypass solenoid MFC set to  0.000000
3/5/2012	11:19:34 AM	Tube furnace set to 750
3/5/2012	11:21:34 AM	H2 valve closed
3/5/2012	11:21:34 AM	BCl3 valve closed
3/5/2012	11:21:34 AM	PH3 valve closed
3/5/2012	11:21:34 AM	SiCl4 pre valve closed
3/5/2012	11:21:34 AM	SiCl4 post valve closed
3/5/2012	11:21:34 AM	Main Vac valve closed
3/5/2012	11:21:34 AM	Bypass valve closed
3/5/2012	11:21:34 AM	Helium valve opened
3/5/2012	11:21:34 AM	Bubbler valve opened
3/5/2012	11:21:34 AM	Helium MFC set to  400.000000
3/5/2012	11:21:34 AM	H2 MFC set to  0.000000
3/5/2012	11:21:34 AM	BCl3 MFC set to  0.000000
3/5/2012	11:21:34 AM	PH3 MFC set to  0.000000
3/5/2012	11:21:34 AM	SiCl4 MFC set to  0.000000
3/5/2012	11:21:34 AM	Bypass solenoid MFC set to  0.000000
3/5/2012	11:21:34 AM	Tube furnace set to 0
3/5/2012	11:46:34 AM	Helium valve closed
3/5/2012	11:46:34 AM	H2 valve closed
3/5/2012	11:46:34 AM	BCl3 valve closed
3/5/2012	11:46:34 AM	PH3 valve closed
3/5/2012	11:46:34 AM	SiCl4 pre valve closed
3/5/2012	11:46:34 AM	SiCl4 post valve closed
3/5/2012	11:46:34 AM	Main Vac valve closed
3/5/2012	11:46:34 AM	Bypass valve closed
3/5/2012	11:46:34 AM	Bubbler valve closed
3/5/2012	11:46:34 AM	Helium MFC set to  0.000000
3/5/2012	11:46:34 AM	H2 MFC set to  0.000000
3/5/2012	11:46:34 AM	BCl3 MFC set to  0.000000
3/5/2012	11:46:34 AM	PH3 MFC set to  0.000000
3/5/2012	11:46:34 AM	SiCl4 MFC set to  0.000000
3/5/2012	11:46:34 AM	Bypass solenoid MFC set to  0.000000
3/5/2012	11:46:34 AM	Tube furnace set to 50
3/5/2012	11:46:57 AM	Run aborted at 11:46 AM
3/5/2012	11:46:57 AM	Helium valve closed
3/5/2012	11:46:57 AM	H2 valve closed
3/5/2012	11:46:57 AM	BCl3 valve closed
3/5/2012	11:46:57 AM	PH3 valve closed
3/5/2012	11:46:57 AM	SiCl4 pre valve closed
3/5/2012	11:46:57 AM	SiCl4 post valve closed
3/5/2012	11:46:57 AM	Bypass valve closed
3/5/2012	11:46:57 AM	Main Vac valve closed
3/5/2012	11:46:57 AM	Bubbler valve closed
3/5/2012	11:46:57 AM	Helium MFC set to  0.000000
3/5/2012	11:46:57 AM	H2 MFC set to  0.000000
3/5/2012	11:46:57 AM	BCl3 MFC set to  0.000000
3/5/2012	11:46:57 AM	PH3 MFC set to  0.000000
3/5/2012	11:46:57 AM	SiCl4 MFC set to  0.000000
3/5/2012	11:46:58 AM	Tube furnace set to 0
3/5/2012	11:49:11 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/5/2012	11:49:12 AM	Recipe started at 11:49 AM
3/5/2012	11:49:12 AM	Helium valve closed
3/5/2012	11:49:12 AM	H2 valve closed
3/5/2012	11:49:12 AM	BCl3 valve closed
3/5/2012	11:49:12 AM	PH3 valve closed
3/5/2012	11:49:12 AM	SiCl4 pre valve closed
3/5/2012	11:49:12 AM	SiCl4 post valve closed
3/5/2012	11:49:12 AM	Main Vac valve closed
3/5/2012	11:49:12 AM	Bubbler valve closed
3/5/2012	11:49:12 AM	Bypass valve opened
3/5/2012	11:49:12 AM	Helium MFC set to  0.000000
3/5/2012	11:49:12 AM	H2 MFC set to  0.000000
3/5/2012	11:49:12 AM	BCl3 MFC set to  0.000000
3/5/2012	11:49:12 AM	PH3 MFC set to  0.000000
3/5/2012	11:49:12 AM	SiCl4 MFC set to  0.000000
3/5/2012	11:49:12 AM	Bypass solenoid MFC set to  0.000000
3/5/2012	11:49:12 AM	Tube furnace set to 0
3/5/2012	11:50:11 AM	Helium valve closed
3/5/2012	11:50:11 AM	H2 valve closed
3/5/2012	11:50:11 AM	BCl3 valve closed
3/5/2012	11:50:11 AM	PH3 valve closed
3/5/2012	11:50:11 AM	SiCl4 pre valve closed
3/5/2012	11:50:11 AM	SiCl4 post valve closed
3/5/2012	11:50:11 AM	Main Vac valve closed
3/5/2012	11:50:11 AM	Bubbler valve closed
3/5/2012	11:50:11 AM	Bypass valve opened
3/5/2012	11:50:11 AM	Helium MFC set to  0.000000
3/5/2012	11:50:11 AM	H2 MFC set to  0.000000
3/5/2012	11:50:11 AM	BCl3 MFC set to  0.000000
3/5/2012	11:50:11 AM	PH3 MFC set to  0.000000
3/5/2012	11:50:11 AM	SiCl4 MFC set to  0.000000
3/5/2012	11:50:11 AM	Bypass solenoid MFC set to  0.000000
3/5/2012	11:50:11 AM	Tube furnace set to 0
3/5/2012	11:51:11 AM	Helium valve closed
3/5/2012	11:51:11 AM	H2 valve closed
3/5/2012	11:51:11 AM	BCl3 valve closed
3/5/2012	11:51:11 AM	PH3 valve closed
3/5/2012	11:51:11 AM	SiCl4 pre valve closed
3/5/2012	11:51:11 AM	SiCl4 post valve closed
3/5/2012	11:51:11 AM	Bypass valve closed
3/5/2012	11:51:11 AM	Bubbler valve closed
3/5/2012	11:51:11 AM	Main Vac valve opened
3/5/2012	11:51:11 AM	Helium MFC set to  0.000000
3/5/2012	11:51:11 AM	H2 MFC set to  0.000000
3/5/2012	11:51:11 AM	BCl3 MFC set to  0.000000
3/5/2012	11:51:11 AM	PH3 MFC set to  0.000000
3/5/2012	11:51:11 AM	SiCl4 MFC set to  0.000000
3/5/2012	11:51:11 AM	Bypass solenoid MFC set to  0.000000
3/5/2012	11:51:11 AM	Tube furnace set to 0
3/5/2012	11:51:12 AM	Run finished at 11:51 AM
3/5/2012	11:51:12 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/5/2012	12:20:37 PM	Main Vac valve closed
3/5/2012	12:21:04 PM	Main Vac valve opened
3/5/2012	12:21:08 PM	Helium MFC set to  20.000000
3/5/2012	12:21:09 PM	Helium valve opened
3/5/2012	12:24:06 PM	Helium valve closed
3/5/2012	12:32:17 PM	Main Vac valve closed
3/5/2012	12:32:24 PM	Helium MFC set to  0.000000
3/5/2012	12:32:41 PM	Main Vac valve opened
3/5/2012	12:34:29 PM	Recipe started at 12:34 PM
3/5/2012	12:34:29 PM	Helium valve closed
3/5/2012	12:34:29 PM	H2 valve closed
3/5/2012	12:34:29 PM	BCl3 valve closed
3/5/2012	12:34:29 PM	PH3 valve closed
3/5/2012	12:34:29 PM	SiCl4 pre valve closed
3/5/2012	12:34:29 PM	SiCl4 post valve closed
3/5/2012	12:34:29 PM	Main Vac valve closed
3/5/2012	12:34:29 PM	Bypass valve closed
3/5/2012	12:34:29 PM	Bubbler valve closed
3/5/2012	12:34:29 PM	Helium MFC set to  0.000000
3/5/2012	12:34:29 PM	H2 MFC set to  0.000000
3/5/2012	12:34:29 PM	BCl3 MFC set to  0.000000
3/5/2012	12:34:29 PM	PH3 MFC set to  0.000000
3/5/2012	12:34:29 PM	SiCl4 MFC set to  0.000000
3/5/2012	12:34:29 PM	Bypass solenoid MFC set to  0.000000
3/5/2012	12:34:29 PM	Tube furnace set to 0
3/5/2012	12:34:32 PM	Helium valve closed
3/5/2012	12:34:32 PM	BCl3 valve closed
3/5/2012	12:34:32 PM	PH3 valve closed
3/5/2012	12:34:32 PM	SiCl4 pre valve closed
3/5/2012	12:34:32 PM	SiCl4 post valve closed
3/5/2012	12:34:32 PM	Main Vac valve closed
3/5/2012	12:34:32 PM	Bypass valve closed
3/5/2012	12:34:32 PM	Bubbler valve closed
3/5/2012	12:34:32 PM	H2 valve opened
3/5/2012	12:34:32 PM	Helium MFC set to  0.000000
3/5/2012	12:34:32 PM	H2 MFC set to  500.000000
3/5/2012	12:34:32 PM	BCl3 MFC set to  0.000000
3/5/2012	12:34:32 PM	PH3 MFC set to  0.000000
3/5/2012	12:34:32 PM	SiCl4 MFC set to  0.000000
3/5/2012	12:34:32 PM	Bypass solenoid MFC set to  0.000000
3/5/2012	12:34:32 PM	Tube furnace set to 70
3/5/2012	12:35:40 PM	Helium valve closed
3/5/2012	12:35:40 PM	BCl3 valve closed
3/5/2012	12:35:40 PM	PH3 valve closed
3/5/2012	12:35:40 PM	SiCl4 pre valve closed
3/5/2012	12:35:40 PM	SiCl4 post valve closed
3/5/2012	12:35:40 PM	Main Vac valve closed
3/5/2012	12:35:40 PM	Bypass valve closed
3/5/2012	12:35:40 PM	H2 valve opened
3/5/2012	12:35:40 PM	Bubbler valve opened
3/5/2012	12:35:40 PM	Helium MFC set to  0.000000
3/5/2012	12:35:40 PM	H2 MFC set to  500.000000
3/5/2012	12:35:40 PM	BCl3 MFC set to  0.000000
3/5/2012	12:35:40 PM	PH3 MFC set to  0.000000
3/5/2012	12:35:40 PM	SiCl4 MFC set to  0.000000
3/5/2012	12:35:40 PM	Bypass solenoid MFC set to  0.000000
3/5/2012	12:35:40 PM	Tube furnace set to 70
3/5/2012	12:35:41 PM	Helium valve closed
3/5/2012	12:35:41 PM	BCl3 valve closed
3/5/2012	12:35:41 PM	PH3 valve closed
3/5/2012	12:35:41 PM	SiCl4 pre valve closed
3/5/2012	12:35:41 PM	SiCl4 post valve closed
3/5/2012	12:35:41 PM	Main Vac valve closed
3/5/2012	12:35:41 PM	Bypass valve closed
3/5/2012	12:35:41 PM	H2 valve opened
3/5/2012	12:35:41 PM	Bubbler valve opened
3/5/2012	12:35:41 PM	Helium MFC set to  0.000000
3/5/2012	12:35:41 PM	H2 MFC set to  450.000000
3/5/2012	12:35:41 PM	BCl3 MFC set to  0.000000
3/5/2012	12:35:41 PM	PH3 MFC set to  0.000000
3/5/2012	12:35:41 PM	SiCl4 MFC set to  0.000000
3/5/2012	12:35:41 PM	Bypass solenoid MFC set to  0.000000
3/5/2012	12:35:41 PM	Tube furnace set to 1000
3/5/2012	12:55:41 PM	Helium valve closed
3/5/2012	12:55:41 PM	PH3 valve closed
3/5/2012	12:55:41 PM	Main Vac valve closed
3/5/2012	12:55:41 PM	Bypass valve closed
3/5/2012	12:55:41 PM	H2 valve opened
3/5/2012	12:55:41 PM	BCl3 valve opened
3/5/2012	12:55:41 PM	SiCl4 pre valve opened
3/5/2012	12:55:41 PM	SiCl4 post valve opened
3/5/2012	12:55:41 PM	Bubbler valve opened
3/5/2012	12:55:41 PM	Helium MFC set to  0.000000
3/5/2012	12:55:41 PM	H2 MFC set to  450.000000
3/5/2012	12:55:41 PM	BCl3 MFC set to  1.200000
3/5/2012	12:55:41 PM	PH3 MFC set to  0.000000
3/5/2012	12:55:41 PM	SiCl4 MFC set to  50.000000
3/5/2012	12:55:41 PM	Bypass solenoid MFC set to  0.000000
3/5/2012	12:55:41 PM	Tube furnace set to 1000
3/5/2012	1:10:41 PM	Helium valve closed
3/5/2012	1:10:41 PM	BCl3 valve closed
3/5/2012	1:10:41 PM	PH3 valve closed
3/5/2012	1:10:41 PM	SiCl4 pre valve closed
3/5/2012	1:10:41 PM	SiCl4 post valve closed
3/5/2012	1:10:41 PM	Main Vac valve closed
3/5/2012	1:10:41 PM	Bypass valve closed
3/5/2012	1:10:41 PM	H2 valve opened
3/5/2012	1:10:41 PM	Bubbler valve opened
3/5/2012	1:10:41 PM	Helium MFC set to  0.000000
3/5/2012	1:10:41 PM	H2 MFC set to  500.000000
3/5/2012	1:10:41 PM	BCl3 MFC set to  0.000000
3/5/2012	1:10:41 PM	PH3 MFC set to  0.000000
3/5/2012	1:10:41 PM	SiCl4 MFC set to  0.000000
3/5/2012	1:10:41 PM	Bypass solenoid MFC set to  0.000000
3/5/2012	1:10:42 PM	Tube furnace set to 750
3/5/2012	1:12:42 PM	H2 valve closed
3/5/2012	1:12:42 PM	BCl3 valve closed
3/5/2012	1:12:42 PM	PH3 valve closed
3/5/2012	1:12:42 PM	SiCl4 pre valve closed
3/5/2012	1:12:42 PM	SiCl4 post valve closed
3/5/2012	1:12:42 PM	Main Vac valve closed
3/5/2012	1:12:42 PM	Bypass valve closed
3/5/2012	1:12:42 PM	Helium valve opened
3/5/2012	1:12:42 PM	Bubbler valve opened
3/5/2012	1:12:42 PM	Helium MFC set to  400.000000
3/5/2012	1:12:42 PM	H2 MFC set to  0.000000
3/5/2012	1:12:42 PM	BCl3 MFC set to  0.000000
3/5/2012	1:12:42 PM	PH3 MFC set to  0.000000
3/5/2012	1:12:42 PM	SiCl4 MFC set to  0.000000
3/5/2012	1:12:42 PM	Bypass solenoid MFC set to  0.000000
3/5/2012	1:12:42 PM	Tube furnace set to 0
3/5/2012	1:37:42 PM	Helium valve closed
3/5/2012	1:37:42 PM	H2 valve closed
3/5/2012	1:37:42 PM	BCl3 valve closed
3/5/2012	1:37:42 PM	PH3 valve closed
3/5/2012	1:37:42 PM	SiCl4 pre valve closed
3/5/2012	1:37:42 PM	SiCl4 post valve closed
3/5/2012	1:37:42 PM	Main Vac valve closed
3/5/2012	1:37:42 PM	Bypass valve closed
3/5/2012	1:37:42 PM	Bubbler valve closed
3/5/2012	1:37:42 PM	Helium MFC set to  0.000000
3/5/2012	1:37:42 PM	H2 MFC set to  0.000000
3/5/2012	1:37:42 PM	BCl3 MFC set to  0.000000
3/5/2012	1:37:42 PM	PH3 MFC set to  0.000000
3/5/2012	1:37:42 PM	SiCl4 MFC set to  0.000000
3/5/2012	1:37:42 PM	Bypass solenoid MFC set to  0.000000
3/5/2012	1:37:42 PM	Tube furnace set to 50
3/5/2012	1:42:42 PM	Helium valve closed
3/5/2012	1:42:42 PM	H2 valve closed
3/5/2012	1:42:42 PM	BCl3 valve closed
3/5/2012	1:42:42 PM	PH3 valve closed
3/5/2012	1:42:42 PM	SiCl4 pre valve closed
3/5/2012	1:42:42 PM	SiCl4 post valve closed
3/5/2012	1:42:42 PM	Main Vac valve closed
3/5/2012	1:42:42 PM	Bubbler valve closed
3/5/2012	1:42:42 PM	Bypass valve opened
3/5/2012	1:42:42 PM	Helium MFC set to  0.000000
3/5/2012	1:42:42 PM	H2 MFC set to  0.000000
3/5/2012	1:42:42 PM	BCl3 MFC set to  0.000000
3/5/2012	1:42:42 PM	PH3 MFC set to  0.000000
3/5/2012	1:42:42 PM	SiCl4 MFC set to  0.000000
3/5/2012	1:42:42 PM	Bypass solenoid MFC set to  0.000000
3/5/2012	1:42:42 PM	Tube furnace set to 0
3/5/2012	1:47:42 PM	Helium valve closed
3/5/2012	1:47:42 PM	H2 valve closed
3/5/2012	1:47:42 PM	BCl3 valve closed
3/5/2012	1:47:42 PM	PH3 valve closed
3/5/2012	1:47:42 PM	SiCl4 pre valve closed
3/5/2012	1:47:42 PM	SiCl4 post valve closed
3/5/2012	1:47:42 PM	Bypass valve closed
3/5/2012	1:47:42 PM	Bubbler valve closed
3/5/2012	1:47:42 PM	Main Vac valve opened
3/5/2012	1:47:42 PM	Helium MFC set to  0.000000
3/5/2012	1:47:42 PM	H2 MFC set to  0.000000
3/5/2012	1:47:42 PM	BCl3 MFC set to  0.000000
3/5/2012	1:47:42 PM	PH3 MFC set to  0.000000
3/5/2012	1:47:42 PM	SiCl4 MFC set to  0.000000
3/5/2012	1:47:42 PM	Bypass solenoid MFC set to  0.000000
3/5/2012	1:47:42 PM	Tube furnace set to 0
3/5/2012	1:47:43 PM	Run finished at 1:47 PM
3/5/2012	3:41:14 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/5/2012	3:41:15 PM	Recipe started at 3:41 PM
3/5/2012	3:41:15 PM	Helium valve closed
3/5/2012	3:41:15 PM	H2 valve closed
3/5/2012	3:41:15 PM	BCl3 valve closed
3/5/2012	3:41:15 PM	PH3 valve closed
3/5/2012	3:41:15 PM	SiCl4 pre valve closed
3/5/2012	3:41:15 PM	SiCl4 post valve closed
3/5/2012	3:41:15 PM	Main Vac valve closed
3/5/2012	3:41:15 PM	Bypass valve closed
3/5/2012	3:41:15 PM	Bubbler valve closed
3/5/2012	3:41:15 PM	Helium MFC set to  0.000000
3/5/2012	3:41:15 PM	H2 MFC set to  0.000000
3/5/2012	3:41:15 PM	BCl3 MFC set to  0.000000
3/5/2012	3:41:15 PM	PH3 MFC set to  0.000000
3/5/2012	3:41:15 PM	SiCl4 MFC set to  0.000000
3/5/2012	3:41:15 PM	Bypass solenoid MFC set to  0.000000
3/5/2012	3:41:15 PM	Tube furnace set to 0
3/5/2012	3:41:18 PM	H2 valve closed
3/5/2012	3:41:18 PM	BCl3 valve closed
3/5/2012	3:41:18 PM	PH3 valve closed
3/5/2012	3:41:18 PM	SiCl4 pre valve closed
3/5/2012	3:41:18 PM	SiCl4 post valve closed
3/5/2012	3:41:18 PM	Main Vac valve closed
3/5/2012	3:41:18 PM	Bypass valve closed
3/5/2012	3:41:18 PM	Bubbler valve closed
3/5/2012	3:41:18 PM	Helium valve opened
3/5/2012	3:41:18 PM	Helium MFC set to  500.000000
3/5/2012	3:41:18 PM	H2 MFC set to  0.000000
3/5/2012	3:41:18 PM	BCl3 MFC set to  0.000000
3/5/2012	3:41:18 PM	PH3 MFC set to  0.000000
3/5/2012	3:41:18 PM	SiCl4 MFC set to  0.000000
3/5/2012	3:41:18 PM	Bypass solenoid MFC set to  0.000000
3/5/2012	3:41:18 PM	Tube furnace set to 0
3/5/2012	3:42:24 PM	Helium valve closed
3/5/2012	3:42:24 PM	H2 valve closed
3/5/2012	3:42:24 PM	BCl3 valve closed
3/5/2012	3:42:24 PM	PH3 valve closed
3/5/2012	3:42:24 PM	SiCl4 pre valve closed
3/5/2012	3:42:24 PM	SiCl4 post valve closed
3/5/2012	3:42:24 PM	Main Vac valve closed
3/5/2012	3:42:24 PM	Bypass valve closed
3/5/2012	3:42:24 PM	Bubbler valve closed
3/5/2012	3:42:24 PM	Helium MFC set to  0.000000
3/5/2012	3:42:24 PM	H2 MFC set to  0.000000
3/5/2012	3:42:24 PM	BCl3 MFC set to  0.000000
3/5/2012	3:42:24 PM	PH3 MFC set to  0.000000
3/5/2012	3:42:24 PM	SiCl4 MFC set to  0.000000
3/5/2012	3:42:24 PM	Bypass solenoid MFC set to  0.000000
3/5/2012	3:42:24 PM	Tube furnace set to 0
3/5/2012	3:42:25 PM	Run finished at 3:42 PM
3/5/2012	3:42:25 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/5/2012	3:45:45 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/5/2012	3:45:46 PM	Recipe started at 3:45 PM
3/5/2012	3:45:46 PM	Helium valve closed
3/5/2012	3:45:46 PM	H2 valve closed
3/5/2012	3:45:46 PM	BCl3 valve closed
3/5/2012	3:45:46 PM	PH3 valve closed
3/5/2012	3:45:46 PM	SiCl4 pre valve closed
3/5/2012	3:45:46 PM	SiCl4 post valve closed
3/5/2012	3:45:46 PM	Main Vac valve closed
3/5/2012	3:45:46 PM	Bubbler valve closed
3/5/2012	3:45:46 PM	Bypass valve opened
3/5/2012	3:45:46 PM	Helium MFC set to  0.000000
3/5/2012	3:45:46 PM	H2 MFC set to  0.000000
3/5/2012	3:45:46 PM	BCl3 MFC set to  0.000000
3/5/2012	3:45:46 PM	PH3 MFC set to  0.000000
3/5/2012	3:45:46 PM	SiCl4 MFC set to  0.000000
3/5/2012	3:45:46 PM	Bypass solenoid MFC set to  0.000000
3/5/2012	3:45:46 PM	Tube furnace set to 0
3/5/2012	3:46:45 PM	Helium valve closed
3/5/2012	3:46:45 PM	H2 valve closed
3/5/2012	3:46:45 PM	BCl3 valve closed
3/5/2012	3:46:45 PM	PH3 valve closed
3/5/2012	3:46:45 PM	SiCl4 pre valve closed
3/5/2012	3:46:45 PM	SiCl4 post valve closed
3/5/2012	3:46:45 PM	Main Vac valve closed
3/5/2012	3:46:45 PM	Bubbler valve closed
3/5/2012	3:46:45 PM	Bypass valve opened
3/5/2012	3:46:45 PM	Helium MFC set to  0.000000
3/5/2012	3:46:45 PM	H2 MFC set to  0.000000
3/5/2012	3:46:45 PM	BCl3 MFC set to  0.000000
3/5/2012	3:46:45 PM	PH3 MFC set to  0.000000
3/5/2012	3:46:45 PM	SiCl4 MFC set to  0.000000
3/5/2012	3:46:45 PM	Bypass solenoid MFC set to  0.000000
3/5/2012	3:46:45 PM	Tube furnace set to 0
3/5/2012	3:47:45 PM	Helium valve closed
3/5/2012	3:47:45 PM	H2 valve closed
3/5/2012	3:47:45 PM	BCl3 valve closed
3/5/2012	3:47:45 PM	PH3 valve closed
3/5/2012	3:47:45 PM	SiCl4 pre valve closed
3/5/2012	3:47:45 PM	SiCl4 post valve closed
3/5/2012	3:47:45 PM	Bypass valve closed
3/5/2012	3:47:45 PM	Bubbler valve closed
3/5/2012	3:47:45 PM	Main Vac valve opened
3/5/2012	3:47:45 PM	Helium MFC set to  0.000000
3/5/2012	3:47:45 PM	H2 MFC set to  0.000000
3/5/2012	3:47:45 PM	BCl3 MFC set to  0.000000
3/5/2012	3:47:45 PM	PH3 MFC set to  0.000000
3/5/2012	3:47:45 PM	SiCl4 MFC set to  0.000000
3/5/2012	3:47:45 PM	Bypass solenoid MFC set to  0.000000
3/5/2012	3:47:46 PM	Tube furnace set to 0
3/5/2012	3:47:47 PM	Run finished at 3:47 PM
3/5/2012	3:47:47 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/5/2012	4:23:51 PM	Main Vac valve closed
3/5/2012	4:24:13 PM	Main Vac valve opened
3/5/2012	4:47:38 PM	Main Vac valve closed
3/5/2012	4:48:13 PM	Main Vac valve opened
3/5/2012	4:48:41 PM	Tube furnace set to 50
3/5/2012	4:49:30 PM	Recipe started at 4:49 PM
3/5/2012	4:49:30 PM	Helium valve closed
3/5/2012	4:49:30 PM	H2 valve closed
3/5/2012	4:49:30 PM	BCl3 valve closed
3/5/2012	4:49:30 PM	PH3 valve closed
3/5/2012	4:49:30 PM	SiCl4 pre valve closed
3/5/2012	4:49:30 PM	SiCl4 post valve closed
3/5/2012	4:49:30 PM	Main Vac valve closed
3/5/2012	4:49:30 PM	Bypass valve closed
3/5/2012	4:49:30 PM	Bubbler valve closed
3/5/2012	4:49:30 PM	Helium MFC set to  0.000000
3/5/2012	4:49:30 PM	H2 MFC set to  0.000000
3/5/2012	4:49:30 PM	BCl3 MFC set to  0.000000
3/5/2012	4:49:30 PM	PH3 MFC set to  0.000000
3/5/2012	4:49:30 PM	SiCl4 MFC set to  0.000000
3/5/2012	4:49:30 PM	Bypass solenoid MFC set to  0.000000
3/5/2012	4:49:30 PM	Tube furnace set to 0
3/5/2012	4:49:33 PM	Helium valve closed
3/5/2012	4:49:33 PM	BCl3 valve closed
3/5/2012	4:49:33 PM	PH3 valve closed
3/5/2012	4:49:33 PM	SiCl4 pre valve closed
3/5/2012	4:49:33 PM	SiCl4 post valve closed
3/5/2012	4:49:33 PM	Main Vac valve closed
3/5/2012	4:49:33 PM	Bypass valve closed
3/5/2012	4:49:33 PM	Bubbler valve closed
3/5/2012	4:49:33 PM	H2 valve opened
3/5/2012	4:49:33 PM	Helium MFC set to  0.000000
3/5/2012	4:49:33 PM	H2 MFC set to  500.000000
3/5/2012	4:49:33 PM	BCl3 MFC set to  0.000000
3/5/2012	4:49:33 PM	PH3 MFC set to  0.000000
3/5/2012	4:49:33 PM	SiCl4 MFC set to  0.000000
3/5/2012	4:49:33 PM	Bypass solenoid MFC set to  0.000000
3/5/2012	4:49:33 PM	Tube furnace set to 70
3/5/2012	4:50:41 PM	Helium valve closed
3/5/2012	4:50:41 PM	BCl3 valve closed
3/5/2012	4:50:41 PM	PH3 valve closed
3/5/2012	4:50:41 PM	SiCl4 pre valve closed
3/5/2012	4:50:41 PM	SiCl4 post valve closed
3/5/2012	4:50:41 PM	Main Vac valve closed
3/5/2012	4:50:41 PM	Bypass valve closed
3/5/2012	4:50:41 PM	H2 valve opened
3/5/2012	4:50:41 PM	Bubbler valve opened
3/5/2012	4:50:41 PM	Helium MFC set to  0.000000
3/5/2012	4:50:41 PM	H2 MFC set to  500.000000
3/5/2012	4:50:41 PM	BCl3 MFC set to  0.000000
3/5/2012	4:50:41 PM	PH3 MFC set to  0.000000
3/5/2012	4:50:41 PM	SiCl4 MFC set to  0.000000
3/5/2012	4:50:41 PM	Bypass solenoid MFC set to  0.000000
3/5/2012	4:50:41 PM	Tube furnace set to 70
3/5/2012	4:50:42 PM	Helium valve closed
3/5/2012	4:50:42 PM	BCl3 valve closed
3/5/2012	4:50:42 PM	PH3 valve closed
3/5/2012	4:50:42 PM	SiCl4 pre valve closed
3/5/2012	4:50:42 PM	SiCl4 post valve closed
3/5/2012	4:50:42 PM	Main Vac valve closed
3/5/2012	4:50:42 PM	Bypass valve closed
3/5/2012	4:50:42 PM	H2 valve opened
3/5/2012	4:50:42 PM	Bubbler valve opened
3/5/2012	4:50:42 PM	Helium MFC set to  0.000000
3/5/2012	4:50:42 PM	H2 MFC set to  450.000000
3/5/2012	4:50:42 PM	BCl3 MFC set to  0.000000
3/5/2012	4:50:42 PM	PH3 MFC set to  0.000000
3/5/2012	4:50:42 PM	SiCl4 MFC set to  0.000000
3/5/2012	4:50:42 PM	Bypass solenoid MFC set to  0.000000
3/5/2012	4:50:42 PM	Tube furnace set to 1000
3/5/2012	5:10:42 PM	Helium valve closed
3/5/2012	5:10:42 PM	PH3 valve closed
3/5/2012	5:10:42 PM	Main Vac valve closed
3/5/2012	5:10:42 PM	Bypass valve closed
3/5/2012	5:10:42 PM	H2 valve opened
3/5/2012	5:10:42 PM	BCl3 valve opened
3/5/2012	5:10:42 PM	SiCl4 pre valve opened
3/5/2012	5:10:42 PM	SiCl4 post valve opened
3/5/2012	5:10:42 PM	Bubbler valve opened
3/5/2012	5:10:42 PM	Helium MFC set to  0.000000
3/5/2012	5:10:42 PM	H2 MFC set to  450.000000
3/5/2012	5:10:42 PM	BCl3 MFC set to  1.500000
3/5/2012	5:10:42 PM	PH3 MFC set to  0.000000
3/5/2012	5:10:42 PM	SiCl4 MFC set to  50.000000
3/5/2012	5:10:42 PM	Bypass solenoid MFC set to  0.000000
3/5/2012	5:10:42 PM	Tube furnace set to 1000
3/5/2012	5:25:42 PM	Helium valve closed
3/5/2012	5:25:42 PM	BCl3 valve closed
3/5/2012	5:25:42 PM	PH3 valve closed
3/5/2012	5:25:42 PM	SiCl4 pre valve closed
3/5/2012	5:25:42 PM	SiCl4 post valve closed
3/5/2012	5:25:42 PM	Main Vac valve closed
3/5/2012	5:25:42 PM	Bypass valve closed
3/5/2012	5:25:42 PM	H2 valve opened
3/5/2012	5:25:42 PM	Bubbler valve opened
3/5/2012	5:25:42 PM	Helium MFC set to  0.000000
3/5/2012	5:25:42 PM	H2 MFC set to  500.000000
3/5/2012	5:25:42 PM	BCl3 MFC set to  0.000000
3/5/2012	5:25:42 PM	PH3 MFC set to  0.000000
3/5/2012	5:25:42 PM	SiCl4 MFC set to  0.000000
3/5/2012	5:25:42 PM	Bypass solenoid MFC set to  0.000000
3/5/2012	5:25:43 PM	Tube furnace set to 750
3/5/2012	5:27:43 PM	H2 valve closed
3/5/2012	5:27:43 PM	BCl3 valve closed
3/5/2012	5:27:43 PM	PH3 valve closed
3/5/2012	5:27:43 PM	SiCl4 pre valve closed
3/5/2012	5:27:43 PM	SiCl4 post valve closed
3/5/2012	5:27:43 PM	Main Vac valve closed
3/5/2012	5:27:43 PM	Bypass valve closed
3/5/2012	5:27:43 PM	Helium valve opened
3/5/2012	5:27:43 PM	Bubbler valve opened
3/5/2012	5:27:43 PM	Helium MFC set to  400.000000
3/5/2012	5:27:43 PM	H2 MFC set to  0.000000
3/5/2012	5:27:43 PM	BCl3 MFC set to  0.000000
3/5/2012	5:27:43 PM	PH3 MFC set to  0.000000
3/5/2012	5:27:43 PM	SiCl4 MFC set to  0.000000
3/5/2012	5:27:43 PM	Bypass solenoid MFC set to  0.000000
3/5/2012	5:27:43 PM	Tube furnace set to 0
3/5/2012	5:52:43 PM	Helium valve closed
3/5/2012	5:52:43 PM	H2 valve closed
3/5/2012	5:52:43 PM	BCl3 valve closed
3/5/2012	5:52:43 PM	PH3 valve closed
3/5/2012	5:52:43 PM	SiCl4 pre valve closed
3/5/2012	5:52:43 PM	SiCl4 post valve closed
3/5/2012	5:52:43 PM	Main Vac valve closed
3/5/2012	5:52:43 PM	Bypass valve closed
3/5/2012	5:52:43 PM	Bubbler valve closed
3/5/2012	5:52:43 PM	Helium MFC set to  0.000000
3/5/2012	5:52:43 PM	H2 MFC set to  0.000000
3/5/2012	5:52:43 PM	BCl3 MFC set to  0.000000
3/5/2012	5:52:43 PM	PH3 MFC set to  0.000000
3/5/2012	5:52:43 PM	SiCl4 MFC set to  0.000000
3/5/2012	5:52:43 PM	Bypass solenoid MFC set to  0.000000
3/5/2012	5:52:43 PM	Tube furnace set to 50
3/5/2012	5:57:43 PM	Helium valve closed
3/5/2012	5:57:43 PM	H2 valve closed
3/5/2012	5:57:43 PM	BCl3 valve closed
3/5/2012	5:57:43 PM	PH3 valve closed
3/5/2012	5:57:43 PM	SiCl4 pre valve closed
3/5/2012	5:57:43 PM	SiCl4 post valve closed
3/5/2012	5:57:43 PM	Main Vac valve closed
3/5/2012	5:57:43 PM	Bubbler valve closed
3/5/2012	5:57:43 PM	Bypass valve opened
3/5/2012	5:57:43 PM	Helium MFC set to  0.000000
3/5/2012	5:57:43 PM	H2 MFC set to  0.000000
3/5/2012	5:57:43 PM	BCl3 MFC set to  0.000000
3/5/2012	5:57:43 PM	PH3 MFC set to  0.000000
3/5/2012	5:57:43 PM	SiCl4 MFC set to  0.000000
3/5/2012	5:57:43 PM	Bypass solenoid MFC set to  0.000000
3/5/2012	5:57:43 PM	Tube furnace set to 0
3/5/2012	5:58:55 PM	Run aborted at 5:58 PM
3/5/2012	5:58:55 PM	Helium valve closed
3/5/2012	5:58:55 PM	H2 valve closed
3/5/2012	5:58:55 PM	BCl3 valve closed
3/5/2012	5:58:55 PM	PH3 valve closed
3/5/2012	5:58:55 PM	SiCl4 pre valve closed
3/5/2012	5:58:55 PM	SiCl4 post valve closed
3/5/2012	5:58:55 PM	Bypass valve closed
3/5/2012	5:58:55 PM	Main Vac valve closed
3/5/2012	5:58:55 PM	Bubbler valve closed
3/5/2012	5:58:55 PM	Helium MFC set to  0.000000
3/5/2012	5:58:55 PM	H2 MFC set to  0.000000
3/5/2012	5:58:55 PM	BCl3 MFC set to  0.000000
3/5/2012	5:58:55 PM	PH3 MFC set to  0.000000
3/5/2012	5:58:55 PM	SiCl4 MFC set to  0.000000
3/5/2012	5:58:55 PM	Tube furnace set to 0
3/5/2012	5:58:58 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/5/2012	5:58:59 PM	Recipe started at 5:58 PM
3/5/2012	5:58:59 PM	Helium valve closed
3/5/2012	5:58:59 PM	H2 valve closed
3/5/2012	5:58:59 PM	BCl3 valve closed
3/5/2012	5:58:59 PM	PH3 valve closed
3/5/2012	5:58:59 PM	SiCl4 pre valve closed
3/5/2012	5:58:59 PM	SiCl4 post valve closed
3/5/2012	5:58:59 PM	Main Vac valve closed
3/5/2012	5:58:59 PM	Bypass valve closed
3/5/2012	5:58:59 PM	Bubbler valve closed
3/5/2012	5:58:59 PM	Helium MFC set to  0.000000
3/5/2012	5:58:59 PM	H2 MFC set to  0.000000
3/5/2012	5:58:59 PM	BCl3 MFC set to  0.000000
3/5/2012	5:58:59 PM	PH3 MFC set to  0.000000
3/5/2012	5:58:59 PM	SiCl4 MFC set to  0.000000
3/5/2012	5:58:59 PM	Bypass solenoid MFC set to  0.000000
3/5/2012	5:58:59 PM	Tube furnace set to 0
3/5/2012	5:59:02 PM	H2 valve closed
3/5/2012	5:59:02 PM	BCl3 valve closed
3/5/2012	5:59:02 PM	PH3 valve closed
3/5/2012	5:59:02 PM	SiCl4 pre valve closed
3/5/2012	5:59:02 PM	SiCl4 post valve closed
3/5/2012	5:59:02 PM	Main Vac valve closed
3/5/2012	5:59:02 PM	Bypass valve closed
3/5/2012	5:59:02 PM	Bubbler valve closed
3/5/2012	5:59:02 PM	Helium valve opened
3/5/2012	5:59:02 PM	Helium MFC set to  500.000000
3/5/2012	5:59:02 PM	H2 MFC set to  0.000000
3/5/2012	5:59:02 PM	BCl3 MFC set to  0.000000
3/5/2012	5:59:02 PM	PH3 MFC set to  0.000000
3/5/2012	5:59:02 PM	SiCl4 MFC set to  0.000000
3/5/2012	5:59:02 PM	Bypass solenoid MFC set to  0.000000
3/5/2012	5:59:02 PM	Tube furnace set to 0
3/5/2012	6:00:06 PM	Helium valve closed
3/5/2012	6:00:06 PM	H2 valve closed
3/5/2012	6:00:06 PM	BCl3 valve closed
3/5/2012	6:00:06 PM	PH3 valve closed
3/5/2012	6:00:06 PM	SiCl4 pre valve closed
3/5/2012	6:00:06 PM	SiCl4 post valve closed
3/5/2012	6:00:06 PM	Main Vac valve closed
3/5/2012	6:00:06 PM	Bypass valve closed
3/5/2012	6:00:06 PM	Bubbler valve closed
3/5/2012	6:00:06 PM	Helium MFC set to  0.000000
3/5/2012	6:00:06 PM	H2 MFC set to  0.000000
3/5/2012	6:00:06 PM	BCl3 MFC set to  0.000000
3/5/2012	6:00:06 PM	PH3 MFC set to  0.000000
3/5/2012	6:00:06 PM	SiCl4 MFC set to  0.000000
3/5/2012	6:00:06 PM	Bypass solenoid MFC set to  0.000000
3/5/2012	6:00:06 PM	Tube furnace set to 0
3/5/2012	6:00:07 PM	Run finished at 6:00 PM
3/5/2012	6:00:07 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/5/2012	6:02:31 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/5/2012	6:02:32 PM	Recipe started at 6:02 PM
3/5/2012	6:02:32 PM	Helium valve closed
3/5/2012	6:02:32 PM	H2 valve closed
3/5/2012	6:02:32 PM	BCl3 valve closed
3/5/2012	6:02:32 PM	PH3 valve closed
3/5/2012	6:02:32 PM	SiCl4 pre valve closed
3/5/2012	6:02:32 PM	SiCl4 post valve closed
3/5/2012	6:02:32 PM	Main Vac valve closed
3/5/2012	6:02:32 PM	Bubbler valve closed
3/5/2012	6:02:32 PM	Bypass valve opened
3/5/2012	6:02:32 PM	Helium MFC set to  0.000000
3/5/2012	6:02:32 PM	H2 MFC set to  0.000000
3/5/2012	6:02:32 PM	BCl3 MFC set to  0.000000
3/5/2012	6:02:32 PM	PH3 MFC set to  0.000000
3/5/2012	6:02:32 PM	SiCl4 MFC set to  0.000000
3/5/2012	6:02:32 PM	Bypass solenoid MFC set to  0.000000
3/5/2012	6:02:33 PM	Tube furnace set to 0
3/5/2012	6:03:32 PM	Helium valve closed
3/5/2012	6:03:32 PM	H2 valve closed
3/5/2012	6:03:32 PM	BCl3 valve closed
3/5/2012	6:03:32 PM	PH3 valve closed
3/5/2012	6:03:32 PM	SiCl4 pre valve closed
3/5/2012	6:03:32 PM	SiCl4 post valve closed
3/5/2012	6:03:32 PM	Main Vac valve closed
3/5/2012	6:03:32 PM	Bubbler valve closed
3/5/2012	6:03:32 PM	Bypass valve opened
3/5/2012	6:03:32 PM	Helium MFC set to  0.000000
3/5/2012	6:03:32 PM	H2 MFC set to  0.000000
3/5/2012	6:03:32 PM	BCl3 MFC set to  0.000000
3/5/2012	6:03:32 PM	PH3 MFC set to  0.000000
3/5/2012	6:03:32 PM	SiCl4 MFC set to  0.000000
3/5/2012	6:03:32 PM	Bypass solenoid MFC set to  0.000000
3/5/2012	6:03:32 PM	Tube furnace set to 0
3/5/2012	6:04:32 PM	Helium valve closed
3/5/2012	6:04:32 PM	H2 valve closed
3/5/2012	6:04:32 PM	BCl3 valve closed
3/5/2012	6:04:32 PM	PH3 valve closed
3/5/2012	6:04:32 PM	SiCl4 pre valve closed
3/5/2012	6:04:32 PM	SiCl4 post valve closed
3/5/2012	6:04:32 PM	Bypass valve closed
3/5/2012	6:04:32 PM	Bubbler valve closed
3/5/2012	6:04:32 PM	Main Vac valve opened
3/5/2012	6:04:32 PM	Helium MFC set to  0.000000
3/5/2012	6:04:32 PM	H2 MFC set to  0.000000
3/5/2012	6:04:32 PM	BCl3 MFC set to  0.000000
3/5/2012	6:04:32 PM	PH3 MFC set to  0.000000
3/5/2012	6:04:32 PM	SiCl4 MFC set to  0.000000
3/5/2012	6:04:32 PM	Bypass solenoid MFC set to  0.000000
3/5/2012	6:04:33 PM	Tube furnace set to 0
3/5/2012	6:04:34 PM	Run finished at 6:04 PM
3/5/2012	6:04:34 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/5/2012	7:13:48 PM	Main Vac valve closed
3/5/2012	7:14:19 PM	Main Vac valve opened
3/5/2012	7:15:01 PM	Recipe started at 7:14 PM
3/5/2012	7:15:01 PM	Helium valve closed
3/5/2012	7:15:01 PM	H2 valve closed
3/5/2012	7:15:01 PM	BCl3 valve closed
3/5/2012	7:15:01 PM	PH3 valve closed
3/5/2012	7:15:01 PM	SiCl4 pre valve closed
3/5/2012	7:15:01 PM	SiCl4 post valve closed
3/5/2012	7:15:01 PM	Main Vac valve closed
3/5/2012	7:15:01 PM	Bypass valve closed
3/5/2012	7:15:01 PM	Bubbler valve closed
3/5/2012	7:15:01 PM	Helium MFC set to  0.000000
3/5/2012	7:15:01 PM	H2 MFC set to  0.000000
3/5/2012	7:15:01 PM	BCl3 MFC set to  0.000000
3/5/2012	7:15:01 PM	PH3 MFC set to  0.000000
3/5/2012	7:15:01 PM	SiCl4 MFC set to  0.000000
3/5/2012	7:15:01 PM	Bypass solenoid MFC set to  0.000000
3/5/2012	7:15:01 PM	Tube furnace set to 0
3/5/2012	7:15:04 PM	Helium valve closed
3/5/2012	7:15:04 PM	BCl3 valve closed
3/5/2012	7:15:04 PM	PH3 valve closed
3/5/2012	7:15:04 PM	SiCl4 pre valve closed
3/5/2012	7:15:04 PM	SiCl4 post valve closed
3/5/2012	7:15:04 PM	Main Vac valve closed
3/5/2012	7:15:04 PM	Bypass valve closed
3/5/2012	7:15:04 PM	Bubbler valve closed
3/5/2012	7:15:04 PM	H2 valve opened
3/5/2012	7:15:04 PM	Helium MFC set to  0.000000
3/5/2012	7:15:04 PM	H2 MFC set to  500.000000
3/5/2012	7:15:04 PM	BCl3 MFC set to  0.000000
3/5/2012	7:15:04 PM	PH3 MFC set to  0.000000
3/5/2012	7:15:04 PM	SiCl4 MFC set to  0.000000
3/5/2012	7:15:04 PM	Bypass solenoid MFC set to  0.000000
3/5/2012	7:15:04 PM	Tube furnace set to 70
3/5/2012	7:16:09 PM	Helium valve closed
3/5/2012	7:16:09 PM	BCl3 valve closed
3/5/2012	7:16:09 PM	PH3 valve closed
3/5/2012	7:16:09 PM	SiCl4 pre valve closed
3/5/2012	7:16:09 PM	SiCl4 post valve closed
3/5/2012	7:16:09 PM	Main Vac valve closed
3/5/2012	7:16:09 PM	Bypass valve closed
3/5/2012	7:16:09 PM	H2 valve opened
3/5/2012	7:16:09 PM	Bubbler valve opened
3/5/2012	7:16:09 PM	Helium MFC set to  0.000000
3/5/2012	7:16:09 PM	H2 MFC set to  500.000000
3/5/2012	7:16:09 PM	BCl3 MFC set to  0.000000
3/5/2012	7:16:09 PM	PH3 MFC set to  0.000000
3/5/2012	7:16:09 PM	SiCl4 MFC set to  0.000000
3/5/2012	7:16:09 PM	Bypass solenoid MFC set to  0.000000
3/5/2012	7:16:10 PM	Tube furnace set to 70
3/5/2012	7:16:11 PM	Helium valve closed
3/5/2012	7:16:11 PM	BCl3 valve closed
3/5/2012	7:16:11 PM	PH3 valve closed
3/5/2012	7:16:11 PM	SiCl4 pre valve closed
3/5/2012	7:16:11 PM	SiCl4 post valve closed
3/5/2012	7:16:11 PM	Main Vac valve closed
3/5/2012	7:16:11 PM	Bypass valve closed
3/5/2012	7:16:11 PM	H2 valve opened
3/5/2012	7:16:11 PM	Bubbler valve opened
3/5/2012	7:16:11 PM	Helium MFC set to  0.000000
3/5/2012	7:16:11 PM	H2 MFC set to  450.000000
3/5/2012	7:16:11 PM	BCl3 MFC set to  0.000000
3/5/2012	7:16:11 PM	PH3 MFC set to  0.000000
3/5/2012	7:16:11 PM	SiCl4 MFC set to  0.000000
3/5/2012	7:16:11 PM	Bypass solenoid MFC set to  0.000000
3/5/2012	7:16:11 PM	Tube furnace set to 1000
3/5/2012	7:36:11 PM	Helium valve closed
3/5/2012	7:36:11 PM	PH3 valve closed
3/5/2012	7:36:11 PM	Main Vac valve closed
3/5/2012	7:36:11 PM	Bypass valve closed
3/5/2012	7:36:11 PM	H2 valve opened
3/5/2012	7:36:11 PM	BCl3 valve opened
3/5/2012	7:36:11 PM	SiCl4 pre valve opened
3/5/2012	7:36:11 PM	SiCl4 post valve opened
3/5/2012	7:36:11 PM	Bubbler valve opened
3/5/2012	7:36:11 PM	Helium MFC set to  0.000000
3/5/2012	7:36:11 PM	H2 MFC set to  450.000000
3/5/2012	7:36:11 PM	BCl3 MFC set to  1.400000
3/5/2012	7:36:11 PM	PH3 MFC set to  0.000000
3/5/2012	7:36:11 PM	SiCl4 MFC set to  50.000000
3/5/2012	7:36:11 PM	Bypass solenoid MFC set to  0.000000
3/5/2012	7:36:11 PM	Tube furnace set to 1000
3/5/2012	7:51:11 PM	Helium valve closed
3/5/2012	7:51:11 PM	BCl3 valve closed
3/5/2012	7:51:11 PM	PH3 valve closed
3/5/2012	7:51:11 PM	SiCl4 pre valve closed
3/5/2012	7:51:11 PM	SiCl4 post valve closed
3/5/2012	7:51:11 PM	Main Vac valve closed
3/5/2012	7:51:11 PM	Bypass valve closed
3/5/2012	7:51:11 PM	H2 valve opened
3/5/2012	7:51:11 PM	Bubbler valve opened
3/5/2012	7:51:11 PM	Helium MFC set to  0.000000
3/5/2012	7:51:11 PM	H2 MFC set to  500.000000
3/5/2012	7:51:11 PM	BCl3 MFC set to  0.000000
3/5/2012	7:51:11 PM	PH3 MFC set to  0.000000
3/5/2012	7:51:11 PM	SiCl4 MFC set to  0.000000
3/5/2012	7:51:11 PM	Bypass solenoid MFC set to  0.000000
3/5/2012	7:51:11 PM	Tube furnace set to 750
3/5/2012	7:53:11 PM	H2 valve closed
3/5/2012	7:53:11 PM	BCl3 valve closed
3/5/2012	7:53:11 PM	PH3 valve closed
3/5/2012	7:53:11 PM	SiCl4 pre valve closed
3/5/2012	7:53:11 PM	SiCl4 post valve closed
3/5/2012	7:53:11 PM	Main Vac valve closed
3/5/2012	7:53:11 PM	Bypass valve closed
3/5/2012	7:53:11 PM	Helium valve opened
3/5/2012	7:53:11 PM	Bubbler valve opened
3/5/2012	7:53:11 PM	Helium MFC set to  400.000000
3/5/2012	7:53:11 PM	H2 MFC set to  0.000000
3/5/2012	7:53:11 PM	BCl3 MFC set to  0.000000
3/5/2012	7:53:11 PM	PH3 MFC set to  0.000000
3/5/2012	7:53:11 PM	SiCl4 MFC set to  0.000000
3/5/2012	7:53:11 PM	Bypass solenoid MFC set to  0.000000
3/5/2012	7:53:11 PM	Tube furnace set to 0
3/5/2012	8:18:11 PM	Helium valve closed
3/5/2012	8:18:11 PM	H2 valve closed
3/5/2012	8:18:11 PM	BCl3 valve closed
3/5/2012	8:18:11 PM	PH3 valve closed
3/5/2012	8:18:11 PM	SiCl4 pre valve closed
3/5/2012	8:18:11 PM	SiCl4 post valve closed
3/5/2012	8:18:11 PM	Main Vac valve closed
3/5/2012	8:18:11 PM	Bypass valve closed
3/5/2012	8:18:11 PM	Bubbler valve closed
3/5/2012	8:18:11 PM	Helium MFC set to  0.000000
3/5/2012	8:18:11 PM	H2 MFC set to  0.000000
3/5/2012	8:18:11 PM	BCl3 MFC set to  0.000000
3/5/2012	8:18:11 PM	PH3 MFC set to  0.000000
3/5/2012	8:18:11 PM	SiCl4 MFC set to  0.000000
3/5/2012	8:18:11 PM	Bypass solenoid MFC set to  0.000000
3/5/2012	8:18:12 PM	Tube furnace set to 50
3/5/2012	8:23:12 PM	Helium valve closed
3/5/2012	8:23:12 PM	H2 valve closed
3/5/2012	8:23:12 PM	BCl3 valve closed
3/5/2012	8:23:12 PM	PH3 valve closed
3/5/2012	8:23:12 PM	SiCl4 pre valve closed
3/5/2012	8:23:12 PM	SiCl4 post valve closed
3/5/2012	8:23:12 PM	Main Vac valve closed
3/5/2012	8:23:12 PM	Bubbler valve closed
3/5/2012	8:23:12 PM	Bypass valve opened
3/5/2012	8:23:12 PM	Helium MFC set to  0.000000
3/5/2012	8:23:12 PM	H2 MFC set to  0.000000
3/5/2012	8:23:12 PM	BCl3 MFC set to  0.000000
3/5/2012	8:23:12 PM	PH3 MFC set to  0.000000
3/5/2012	8:23:12 PM	SiCl4 MFC set to  0.000000
3/5/2012	8:23:12 PM	Bypass solenoid MFC set to  0.000000
3/5/2012	8:23:12 PM	Tube furnace set to 0
3/5/2012	8:28:12 PM	Helium valve closed
3/5/2012	8:28:12 PM	H2 valve closed
3/5/2012	8:28:12 PM	BCl3 valve closed
3/5/2012	8:28:12 PM	PH3 valve closed
3/5/2012	8:28:12 PM	SiCl4 pre valve closed
3/5/2012	8:28:12 PM	SiCl4 post valve closed
3/5/2012	8:28:12 PM	Bypass valve closed
3/5/2012	8:28:12 PM	Bubbler valve closed
3/5/2012	8:28:12 PM	Main Vac valve opened
3/5/2012	8:28:12 PM	Helium MFC set to  0.000000
3/5/2012	8:28:12 PM	H2 MFC set to  0.000000
3/5/2012	8:28:12 PM	BCl3 MFC set to  0.000000
3/5/2012	8:28:12 PM	PH3 MFC set to  0.000000
3/5/2012	8:28:12 PM	SiCl4 MFC set to  0.000000
3/5/2012	8:28:12 PM	Bypass solenoid MFC set to  0.000000
3/5/2012	8:28:12 PM	Tube furnace set to 0
3/5/2012	8:28:13 PM	Run finished at 8:28 PM
3/5/2012	8:47:08 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/5/2012	8:47:09 PM	Recipe started at 8:47 PM
3/5/2012	8:47:09 PM	Helium valve closed
3/5/2012	8:47:09 PM	H2 valve closed
3/5/2012	8:47:09 PM	BCl3 valve closed
3/5/2012	8:47:09 PM	PH3 valve closed
3/5/2012	8:47:09 PM	SiCl4 pre valve closed
3/5/2012	8:47:09 PM	SiCl4 post valve closed
3/5/2012	8:47:09 PM	Main Vac valve closed
3/5/2012	8:47:09 PM	Bypass valve closed
3/5/2012	8:47:09 PM	Bubbler valve closed
3/5/2012	8:47:09 PM	Helium MFC set to  0.000000
3/5/2012	8:47:09 PM	H2 MFC set to  0.000000
3/5/2012	8:47:09 PM	BCl3 MFC set to  0.000000
3/5/2012	8:47:09 PM	PH3 MFC set to  0.000000
3/5/2012	8:47:09 PM	SiCl4 MFC set to  0.000000
3/5/2012	8:47:09 PM	Bypass solenoid MFC set to  0.000000
3/5/2012	8:47:10 PM	Tube furnace set to 0
3/5/2012	8:47:13 PM	H2 valve closed
3/5/2012	8:47:13 PM	BCl3 valve closed
3/5/2012	8:47:13 PM	PH3 valve closed
3/5/2012	8:47:13 PM	SiCl4 pre valve closed
3/5/2012	8:47:13 PM	SiCl4 post valve closed
3/5/2012	8:47:13 PM	Main Vac valve closed
3/5/2012	8:47:13 PM	Bypass valve closed
3/5/2012	8:47:13 PM	Bubbler valve closed
3/5/2012	8:47:13 PM	Helium valve opened
3/5/2012	8:47:13 PM	Helium MFC set to  500.000000
3/5/2012	8:47:13 PM	H2 MFC set to  0.000000
3/5/2012	8:47:13 PM	BCl3 MFC set to  0.000000
3/5/2012	8:47:13 PM	PH3 MFC set to  0.000000
3/5/2012	8:47:13 PM	SiCl4 MFC set to  0.000000
3/5/2012	8:47:13 PM	Bypass solenoid MFC set to  0.000000
3/5/2012	8:47:13 PM	Tube furnace set to 0
3/5/2012	8:48:16 PM	Helium valve closed
3/5/2012	8:48:16 PM	H2 valve closed
3/5/2012	8:48:16 PM	BCl3 valve closed
3/5/2012	8:48:16 PM	PH3 valve closed
3/5/2012	8:48:16 PM	SiCl4 pre valve closed
3/5/2012	8:48:16 PM	SiCl4 post valve closed
3/5/2012	8:48:16 PM	Main Vac valve closed
3/5/2012	8:48:16 PM	Bypass valve closed
3/5/2012	8:48:16 PM	Bubbler valve closed
3/5/2012	8:48:16 PM	Helium MFC set to  0.000000
3/5/2012	8:48:16 PM	H2 MFC set to  0.000000
3/5/2012	8:48:16 PM	BCl3 MFC set to  0.000000
3/5/2012	8:48:16 PM	PH3 MFC set to  0.000000
3/5/2012	8:48:16 PM	SiCl4 MFC set to  0.000000
3/5/2012	8:48:16 PM	Bypass solenoid MFC set to  0.000000
3/5/2012	8:48:16 PM	Tube furnace set to 0
3/5/2012	8:48:17 PM	Run finished at 8:48 PM
3/5/2012	8:48:17 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/5/2012	8:51:05 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/5/2012	8:51:06 PM	Recipe started at 8:51 PM
3/5/2012	8:51:06 PM	Helium valve closed
3/5/2012	8:51:06 PM	H2 valve closed
3/5/2012	8:51:06 PM	BCl3 valve closed
3/5/2012	8:51:06 PM	PH3 valve closed
3/5/2012	8:51:06 PM	SiCl4 pre valve closed
3/5/2012	8:51:06 PM	SiCl4 post valve closed
3/5/2012	8:51:06 PM	Main Vac valve closed
3/5/2012	8:51:06 PM	Bubbler valve closed
3/5/2012	8:51:06 PM	Bypass valve opened
3/5/2012	8:51:06 PM	Helium MFC set to  0.000000
3/5/2012	8:51:06 PM	H2 MFC set to  0.000000
3/5/2012	8:51:06 PM	BCl3 MFC set to  0.000000
3/5/2012	8:51:06 PM	PH3 MFC set to  0.000000
3/5/2012	8:51:06 PM	SiCl4 MFC set to  0.000000
3/5/2012	8:51:06 PM	Bypass solenoid MFC set to  0.000000
3/5/2012	8:51:06 PM	Tube furnace set to 0
3/5/2012	8:52:04 PM	Helium valve closed
3/5/2012	8:52:04 PM	H2 valve closed
3/5/2012	8:52:04 PM	BCl3 valve closed
3/5/2012	8:52:04 PM	PH3 valve closed
3/5/2012	8:52:04 PM	SiCl4 pre valve closed
3/5/2012	8:52:04 PM	SiCl4 post valve closed
3/5/2012	8:52:04 PM	Main Vac valve closed
3/5/2012	8:52:04 PM	Bubbler valve closed
3/5/2012	8:52:04 PM	Bypass valve opened
3/5/2012	8:52:04 PM	Helium MFC set to  0.000000
3/5/2012	8:52:04 PM	H2 MFC set to  0.000000
3/5/2012	8:52:04 PM	BCl3 MFC set to  0.000000
3/5/2012	8:52:04 PM	PH3 MFC set to  0.000000
3/5/2012	8:52:04 PM	SiCl4 MFC set to  0.000000
3/5/2012	8:52:04 PM	Bypass solenoid MFC set to  0.000000
3/5/2012	8:52:04 PM	Tube furnace set to 0
3/5/2012	8:53:04 PM	Helium valve closed
3/5/2012	8:53:04 PM	H2 valve closed
3/5/2012	8:53:04 PM	BCl3 valve closed
3/5/2012	8:53:04 PM	PH3 valve closed
3/5/2012	8:53:04 PM	SiCl4 pre valve closed
3/5/2012	8:53:04 PM	SiCl4 post valve closed
3/5/2012	8:53:04 PM	Bypass valve closed
3/5/2012	8:53:04 PM	Bubbler valve closed
3/5/2012	8:53:04 PM	Main Vac valve opened
3/5/2012	8:53:04 PM	Helium MFC set to  0.000000
3/5/2012	8:53:04 PM	H2 MFC set to  0.000000
3/5/2012	8:53:04 PM	BCl3 MFC set to  0.000000
3/5/2012	8:53:04 PM	PH3 MFC set to  0.000000
3/5/2012	8:53:04 PM	SiCl4 MFC set to  0.000000
3/5/2012	8:53:04 PM	Bypass solenoid MFC set to  0.000000
3/5/2012	8:53:05 PM	Tube furnace set to 0
3/5/2012	8:53:06 PM	Run finished at 8:53 PM
3/5/2012	8:53:06 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/5/2012	9:12:41 PM	Helium MFC set to  20.000000
3/5/2012	9:12:43 PM	Helium valve opened
3/5/2012	9:15:02 PM	Helium valve closed
3/5/2012	9:17:16 PM	Main Vac valve closed
3/5/2012	9:17:57 PM	Main Vac valve opened
3/5/2012	9:18:10 PM	Helium valve opened
3/5/2012	9:18:51 PM	Helium valve closed
3/5/2012	9:20:17 PM	Main Vac valve closed
3/5/2012	9:21:07 PM	Main Vac valve opened
3/5/2012	9:23:32 PM	Recipe started at 9:23 PM
3/5/2012	9:23:32 PM	Helium valve closed
3/5/2012	9:23:32 PM	H2 valve closed
3/5/2012	9:23:32 PM	BCl3 valve closed
3/5/2012	9:23:32 PM	PH3 valve closed
3/5/2012	9:23:32 PM	SiCl4 pre valve closed
3/5/2012	9:23:32 PM	SiCl4 post valve closed
3/5/2012	9:23:32 PM	Main Vac valve closed
3/5/2012	9:23:32 PM	Bypass valve closed
3/5/2012	9:23:32 PM	Bubbler valve closed
3/5/2012	9:23:32 PM	Helium MFC set to  0.000000
3/5/2012	9:23:32 PM	H2 MFC set to  0.000000
3/5/2012	9:23:32 PM	BCl3 MFC set to  0.000000
3/5/2012	9:23:32 PM	PH3 MFC set to  0.000000
3/5/2012	9:23:32 PM	SiCl4 MFC set to  0.000000
3/5/2012	9:23:32 PM	Bypass solenoid MFC set to  0.000000
3/5/2012	9:23:32 PM	Tube furnace set to 0
3/5/2012	9:23:35 PM	Helium valve closed
3/5/2012	9:23:35 PM	BCl3 valve closed
3/5/2012	9:23:35 PM	PH3 valve closed
3/5/2012	9:23:35 PM	SiCl4 pre valve closed
3/5/2012	9:23:35 PM	SiCl4 post valve closed
3/5/2012	9:23:35 PM	Main Vac valve closed
3/5/2012	9:23:35 PM	Bypass valve closed
3/5/2012	9:23:35 PM	Bubbler valve closed
3/5/2012	9:23:35 PM	H2 valve opened
3/5/2012	9:23:35 PM	Helium MFC set to  0.000000
3/5/2012	9:23:35 PM	H2 MFC set to  500.000000
3/5/2012	9:23:35 PM	BCl3 MFC set to  0.000000
3/5/2012	9:23:35 PM	PH3 MFC set to  0.000000
3/5/2012	9:23:35 PM	SiCl4 MFC set to  0.000000
3/5/2012	9:23:35 PM	Bypass solenoid MFC set to  0.000000
3/5/2012	9:23:35 PM	Tube furnace set to 70
3/5/2012	9:24:41 PM	Helium valve closed
3/5/2012	9:24:41 PM	BCl3 valve closed
3/5/2012	9:24:41 PM	PH3 valve closed
3/5/2012	9:24:41 PM	SiCl4 pre valve closed
3/5/2012	9:24:41 PM	SiCl4 post valve closed
3/5/2012	9:24:41 PM	Main Vac valve closed
3/5/2012	9:24:41 PM	Bypass valve closed
3/5/2012	9:24:41 PM	H2 valve opened
3/5/2012	9:24:41 PM	Bubbler valve opened
3/5/2012	9:24:41 PM	Helium MFC set to  0.000000
3/5/2012	9:24:41 PM	H2 MFC set to  500.000000
3/5/2012	9:24:41 PM	BCl3 MFC set to  0.000000
3/5/2012	9:24:41 PM	PH3 MFC set to  0.000000
3/5/2012	9:24:41 PM	SiCl4 MFC set to  0.000000
3/5/2012	9:24:41 PM	Bypass solenoid MFC set to  0.000000
3/5/2012	9:24:42 PM	Tube furnace set to 70
3/5/2012	9:24:43 PM	Helium valve closed
3/5/2012	9:24:43 PM	BCl3 valve closed
3/5/2012	9:24:43 PM	PH3 valve closed
3/5/2012	9:24:43 PM	SiCl4 pre valve closed
3/5/2012	9:24:43 PM	SiCl4 post valve closed
3/5/2012	9:24:43 PM	Main Vac valve closed
3/5/2012	9:24:43 PM	Bypass valve closed
3/5/2012	9:24:43 PM	H2 valve opened
3/5/2012	9:24:43 PM	Bubbler valve opened
3/5/2012	9:24:43 PM	Helium MFC set to  0.000000
3/5/2012	9:24:43 PM	H2 MFC set to  450.000000
3/5/2012	9:24:43 PM	BCl3 MFC set to  0.000000
3/5/2012	9:24:43 PM	PH3 MFC set to  0.000000
3/5/2012	9:24:43 PM	SiCl4 MFC set to  0.000000
3/5/2012	9:24:43 PM	Bypass solenoid MFC set to  0.000000
3/5/2012	9:24:43 PM	Tube furnace set to 1000
3/5/2012	9:44:43 PM	Helium valve closed
3/5/2012	9:44:43 PM	PH3 valve closed
3/5/2012	9:44:43 PM	Main Vac valve closed
3/5/2012	9:44:43 PM	Bypass valve closed
3/5/2012	9:44:43 PM	H2 valve opened
3/5/2012	9:44:43 PM	BCl3 valve opened
3/5/2012	9:44:43 PM	SiCl4 pre valve opened
3/5/2012	9:44:43 PM	SiCl4 post valve opened
3/5/2012	9:44:43 PM	Bubbler valve opened
3/5/2012	9:44:43 PM	Helium MFC set to  0.000000
3/5/2012	9:44:43 PM	H2 MFC set to  450.000000
3/5/2012	9:44:43 PM	BCl3 MFC set to  1.400000
3/5/2012	9:44:43 PM	PH3 MFC set to  0.000000
3/5/2012	9:44:43 PM	SiCl4 MFC set to  50.000000
3/5/2012	9:44:43 PM	Bypass solenoid MFC set to  0.000000
3/5/2012	9:44:43 PM	Tube furnace set to 1000
3/5/2012	10:00:43 PM	Helium valve closed
3/5/2012	10:00:43 PM	BCl3 valve closed
3/5/2012	10:00:43 PM	PH3 valve closed
3/5/2012	10:00:43 PM	SiCl4 pre valve closed
3/5/2012	10:00:43 PM	SiCl4 post valve closed
3/5/2012	10:00:43 PM	Main Vac valve closed
3/5/2012	10:00:43 PM	Bypass valve closed
3/5/2012	10:00:43 PM	H2 valve opened
3/5/2012	10:00:43 PM	Bubbler valve opened
3/5/2012	10:00:43 PM	Helium MFC set to  0.000000
3/5/2012	10:00:43 PM	H2 MFC set to  500.000000
3/5/2012	10:00:43 PM	BCl3 MFC set to  0.000000
3/5/2012	10:00:43 PM	PH3 MFC set to  0.000000
3/5/2012	10:00:43 PM	SiCl4 MFC set to  0.000000
3/5/2012	10:00:43 PM	Bypass solenoid MFC set to  0.000000
3/5/2012	10:00:43 PM	Tube furnace set to 750
3/5/2012	10:02:43 PM	H2 valve closed
3/5/2012	10:02:43 PM	BCl3 valve closed
3/5/2012	10:02:43 PM	PH3 valve closed
3/5/2012	10:02:43 PM	SiCl4 pre valve closed
3/5/2012	10:02:43 PM	SiCl4 post valve closed
3/5/2012	10:02:43 PM	Main Vac valve closed
3/5/2012	10:02:43 PM	Bypass valve closed
3/5/2012	10:02:43 PM	Helium valve opened
3/5/2012	10:02:43 PM	Bubbler valve opened
3/5/2012	10:02:43 PM	Helium MFC set to  400.000000
3/5/2012	10:02:43 PM	H2 MFC set to  0.000000
3/5/2012	10:02:43 PM	BCl3 MFC set to  0.000000
3/5/2012	10:02:43 PM	PH3 MFC set to  0.000000
3/5/2012	10:02:43 PM	SiCl4 MFC set to  0.000000
3/5/2012	10:02:43 PM	Bypass solenoid MFC set to  0.000000
3/5/2012	10:02:43 PM	Tube furnace set to 0
3/5/2012	10:27:43 PM	Helium valve closed
3/5/2012	10:27:43 PM	H2 valve closed
3/5/2012	10:27:43 PM	BCl3 valve closed
3/5/2012	10:27:43 PM	PH3 valve closed
3/5/2012	10:27:43 PM	SiCl4 pre valve closed
3/5/2012	10:27:43 PM	SiCl4 post valve closed
3/5/2012	10:27:43 PM	Main Vac valve closed
3/5/2012	10:27:43 PM	Bypass valve closed
3/5/2012	10:27:43 PM	Bubbler valve closed
3/5/2012	10:27:43 PM	Helium MFC set to  0.000000
3/5/2012	10:27:43 PM	H2 MFC set to  0.000000
3/5/2012	10:27:43 PM	BCl3 MFC set to  0.000000
3/5/2012	10:27:43 PM	PH3 MFC set to  0.000000
3/5/2012	10:27:43 PM	SiCl4 MFC set to  0.000000
3/5/2012	10:27:43 PM	Bypass solenoid MFC set to  0.000000
3/5/2012	10:27:43 PM	Tube furnace set to 50
3/5/2012	10:32:44 PM	Helium valve closed
3/5/2012	10:32:44 PM	H2 valve closed
3/5/2012	10:32:44 PM	BCl3 valve closed
3/5/2012	10:32:44 PM	PH3 valve closed
3/5/2012	10:32:44 PM	SiCl4 pre valve closed
3/5/2012	10:32:44 PM	SiCl4 post valve closed
3/5/2012	10:32:44 PM	Main Vac valve closed
3/5/2012	10:32:44 PM	Bubbler valve closed
3/5/2012	10:32:44 PM	Bypass valve opened
3/5/2012	10:32:44 PM	Helium MFC set to  0.000000
3/5/2012	10:32:44 PM	H2 MFC set to  0.000000
3/5/2012	10:32:44 PM	BCl3 MFC set to  0.000000
3/5/2012	10:32:44 PM	PH3 MFC set to  0.000000
3/5/2012	10:32:44 PM	SiCl4 MFC set to  0.000000
3/5/2012	10:32:44 PM	Bypass solenoid MFC set to  0.000000
3/5/2012	10:32:44 PM	Tube furnace set to 0
3/5/2012	10:37:44 PM	Helium valve closed
3/5/2012	10:37:44 PM	H2 valve closed
3/5/2012	10:37:44 PM	BCl3 valve closed
3/5/2012	10:37:44 PM	PH3 valve closed
3/5/2012	10:37:44 PM	SiCl4 pre valve closed
3/5/2012	10:37:44 PM	SiCl4 post valve closed
3/5/2012	10:37:44 PM	Bypass valve closed
3/5/2012	10:37:44 PM	Bubbler valve closed
3/5/2012	10:37:44 PM	Main Vac valve opened
3/5/2012	10:37:44 PM	Helium MFC set to  0.000000
3/5/2012	10:37:44 PM	H2 MFC set to  0.000000
3/5/2012	10:37:44 PM	BCl3 MFC set to  0.000000
3/5/2012	10:37:44 PM	PH3 MFC set to  0.000000
3/5/2012	10:37:44 PM	SiCl4 MFC set to  0.000000
3/5/2012	10:37:44 PM	Bypass solenoid MFC set to  0.000000
3/5/2012	10:37:44 PM	Tube furnace set to 0
3/5/2012	10:37:45 PM	Run finished at 10:37 PM
3/5/2012	10:46:49 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/5/2012	10:46:50 PM	Recipe started at 10:46 PM
3/5/2012	10:46:50 PM	Helium valve closed
3/5/2012	10:46:50 PM	H2 valve closed
3/5/2012	10:46:50 PM	BCl3 valve closed
3/5/2012	10:46:50 PM	PH3 valve closed
3/5/2012	10:46:50 PM	SiCl4 pre valve closed
3/5/2012	10:46:50 PM	SiCl4 post valve closed
3/5/2012	10:46:50 PM	Main Vac valve closed
3/5/2012	10:46:50 PM	Bypass valve closed
3/5/2012	10:46:50 PM	Bubbler valve closed
3/5/2012	10:46:50 PM	Helium MFC set to  0.000000
3/5/2012	10:46:50 PM	H2 MFC set to  0.000000
3/5/2012	10:46:50 PM	BCl3 MFC set to  0.000000
3/5/2012	10:46:50 PM	PH3 MFC set to  0.000000
3/5/2012	10:46:50 PM	SiCl4 MFC set to  0.000000
3/5/2012	10:46:50 PM	Bypass solenoid MFC set to  0.000000
3/5/2012	10:46:51 PM	Tube furnace set to 0
3/5/2012	10:46:54 PM	H2 valve closed
3/5/2012	10:46:54 PM	BCl3 valve closed
3/5/2012	10:46:54 PM	PH3 valve closed
3/5/2012	10:46:54 PM	SiCl4 pre valve closed
3/5/2012	10:46:54 PM	SiCl4 post valve closed
3/5/2012	10:46:54 PM	Main Vac valve closed
3/5/2012	10:46:54 PM	Bypass valve closed
3/5/2012	10:46:54 PM	Bubbler valve closed
3/5/2012	10:46:54 PM	Helium valve opened
3/5/2012	10:46:54 PM	Helium MFC set to  500.000000
3/5/2012	10:46:54 PM	H2 MFC set to  0.000000
3/5/2012	10:46:54 PM	BCl3 MFC set to  0.000000
3/5/2012	10:46:54 PM	PH3 MFC set to  0.000000
3/5/2012	10:46:54 PM	SiCl4 MFC set to  0.000000
3/5/2012	10:46:54 PM	Bypass solenoid MFC set to  0.000000
3/5/2012	10:46:54 PM	Tube furnace set to 0
3/5/2012	10:47:58 PM	Helium valve closed
3/5/2012	10:47:58 PM	H2 valve closed
3/5/2012	10:47:58 PM	BCl3 valve closed
3/5/2012	10:47:58 PM	PH3 valve closed
3/5/2012	10:47:58 PM	SiCl4 pre valve closed
3/5/2012	10:47:58 PM	SiCl4 post valve closed
3/5/2012	10:47:58 PM	Main Vac valve closed
3/5/2012	10:47:58 PM	Bypass valve closed
3/5/2012	10:47:58 PM	Bubbler valve closed
3/5/2012	10:47:58 PM	Helium MFC set to  0.000000
3/5/2012	10:47:58 PM	H2 MFC set to  0.000000
3/5/2012	10:47:58 PM	BCl3 MFC set to  0.000000
3/5/2012	10:47:58 PM	PH3 MFC set to  0.000000
3/5/2012	10:47:58 PM	SiCl4 MFC set to  0.000000
3/5/2012	10:47:58 PM	Bypass solenoid MFC set to  0.000000
3/5/2012	10:47:58 PM	Tube furnace set to 0
3/5/2012	10:47:59 PM	Run finished at 10:47 PM
3/5/2012	10:47:59 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/5/2012	10:50:53 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/5/2012	10:50:54 PM	Recipe started at 10:50 PM
3/5/2012	10:50:54 PM	Helium valve closed
3/5/2012	10:50:54 PM	H2 valve closed
3/5/2012	10:50:54 PM	BCl3 valve closed
3/5/2012	10:50:54 PM	PH3 valve closed
3/5/2012	10:50:54 PM	SiCl4 pre valve closed
3/5/2012	10:50:54 PM	SiCl4 post valve closed
3/5/2012	10:50:54 PM	Main Vac valve closed
3/5/2012	10:50:54 PM	Bubbler valve closed
3/5/2012	10:50:54 PM	Bypass valve opened
3/5/2012	10:50:54 PM	Helium MFC set to  0.000000
3/5/2012	10:50:54 PM	H2 MFC set to  0.000000
3/5/2012	10:50:54 PM	BCl3 MFC set to  0.000000
3/5/2012	10:50:54 PM	PH3 MFC set to  0.000000
3/5/2012	10:50:54 PM	SiCl4 MFC set to  0.000000
3/5/2012	10:50:54 PM	Bypass solenoid MFC set to  0.000000
3/5/2012	10:50:54 PM	Tube furnace set to 0
3/5/2012	10:51:55 PM	Helium valve closed
3/5/2012	10:51:55 PM	H2 valve closed
3/5/2012	10:51:55 PM	BCl3 valve closed
3/5/2012	10:51:55 PM	PH3 valve closed
3/5/2012	10:51:55 PM	SiCl4 pre valve closed
3/5/2012	10:51:55 PM	SiCl4 post valve closed
3/5/2012	10:51:55 PM	Main Vac valve closed
3/5/2012	10:51:55 PM	Bubbler valve closed
3/5/2012	10:51:55 PM	Bypass valve opened
3/5/2012	10:51:55 PM	Helium MFC set to  0.000000
3/5/2012	10:51:55 PM	H2 MFC set to  0.000000
3/5/2012	10:51:55 PM	BCl3 MFC set to  0.000000
3/5/2012	10:51:55 PM	PH3 MFC set to  0.000000
3/5/2012	10:51:55 PM	SiCl4 MFC set to  0.000000
3/5/2012	10:51:55 PM	Bypass solenoid MFC set to  0.000000
3/5/2012	10:51:55 PM	Tube furnace set to 0
3/5/2012	10:52:55 PM	Helium valve closed
3/5/2012	10:52:55 PM	H2 valve closed
3/5/2012	10:52:55 PM	BCl3 valve closed
3/5/2012	10:52:55 PM	PH3 valve closed
3/5/2012	10:52:55 PM	SiCl4 pre valve closed
3/5/2012	10:52:55 PM	SiCl4 post valve closed
3/5/2012	10:52:55 PM	Bypass valve closed
3/5/2012	10:52:55 PM	Bubbler valve closed
3/5/2012	10:52:55 PM	Main Vac valve opened
3/5/2012	10:52:55 PM	Helium MFC set to  0.000000
3/5/2012	10:52:55 PM	H2 MFC set to  0.000000
3/5/2012	10:52:55 PM	BCl3 MFC set to  0.000000
3/5/2012	10:52:55 PM	PH3 MFC set to  0.000000
3/5/2012	10:52:55 PM	SiCl4 MFC set to  0.000000
3/5/2012	10:52:55 PM	Bypass solenoid MFC set to  0.000000
3/5/2012	10:52:55 PM	Tube furnace set to 0
3/5/2012	10:52:56 PM	Run finished at 10:52 PM
3/5/2012	10:52:56 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
